Influence of the interface preparation on properties of PECVD TiN
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Structure characterization of plasma-deposited TiN coatings
2. The effects of chlorine content on the properties of titanium carbonitride thin film deposited by plasma assisted chemical vapor deposition
3. Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
4. The effect of reactant gas composition on the plasmaenhanced chemical vapour deposition of TiN
5. Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
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1. Deposition of TiN, TiC, and DLC Coatings by PACVD;Production, Properties, and Applications of High Temperature Coatings;2018
2. A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition;International Journal of Engineering;2016-05-01
3. The Influence of Plasma Nitriding Pre-Treatment on Tribological Properties of TiN Coatings Deposited by PACVD;J MATER ENG PERFORM;2012
4. The Influence of Pre-treatment Plasma Nitriding on Tribological Properties of TiN Coatings Produced by PACVD;Supplemental Proceedings;2011-04-25
5. Plasma-enhanced chemical vapour deposition of inorganic nanomaterials using a chloride precursor;Journal of Physics D: Applied Physics;2011-04-14
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