Simulation of ion imaging: Sputtering, contrast, noise
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Contrast mechanisms and image formation in helium ion microscopy;Bell;Microsc. Microanal.,2009
2. Helium ion microscopy and its application to nanotechnology and nanometrology;Postek;Scanning,2008
3. Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes;Ohya;J. Electron Microsc.,2003
4. Comparison in spatial spreads of secondary electron information between scanning ion and scanning electron microscopy;Ishitani;Scanning,2003
5. Sputtering limits versus signal-to-noise limits in the observation of Sn-balls in a Ga+ microscope;Castaldo;J. Vac. Sci. Technol. B,2008
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