Sputtering limits versus signal-to-noise limits in the observation of Sn balls in a Ga+ microscope-Reference-Cited by-同舟云学术

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Sputtering limits versus signal-to-noise limits in the observation of Sn balls in a Ga+ microscope

Published:2008-11 Issue:6 Volume:26 Page:2107-2115
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Castaldo V.¹,Hagen C. W.¹,Rieger B.¹,Kruit P.¹

Affiliation:

1. Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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