Author:
Lin H.H.,Cheng S.L.,Chen L.J.,Chen W.C.,Liou Y.,Chien H.C.
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. Effects of implantation energy and annealing temperature on the structural evolution of Ge+-implanted amorphous Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08