Large volume tomography using plasma FIB-SEM: A comprehensive case study on black silicon-Reference-Cited by-同舟云学术

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Large volume tomography using plasma FIB-SEM: A comprehensive case study on black silicon

Published:2022-03 Issue: Volume:233 Page:113458
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Zhang Yu,Kong Charlie,Scardera Giuseppe,Abbott Malcolm,Payne David N.R.,Hoex Bram

Funder

University of New South Wales

Velux Foundation

ARENA

Velux Fonden

Danmarks Tekniske Universitet

Australian Government

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference45 articles.

1. A review of focused ion beam milling techniques for TEM specimen preparation

2. Improvements in performance of focused ion beam cross-sectioning: aspects of ion-sample interaction

3. In situ site-specific specimen preparation for atom probe tomography

4. Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography

5. Gas-assisted focused electron beam and ion beam processing and fabrication

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2. Microstructural Investigation and Serial Section Tomography on ASIC Chips for Assurance Through Reverse Engineering Applications;2023 IEEE Physical Assurance and Inspection of Electronics (PAINE);2023-10-24

3. Image Based Methodologies, Workflows, and Calculation Approaches for Tortuosity;Tortuosity and Microstructure Effects in Porous Media;2023

4. Plasma Focused Ion Beam Tomography for Accurate Characterization of Black Silicon Validated by Full Wave Optical Simulation;Advanced Materials Technologies;2022-04-28

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