Formation of compositionally graded multilayer films by discharge gas flow modulation in magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance
2. Multilayer PVD coatings for wear protection
3. Deposition and mechanical properties of multilayered PVD Ti−TiN coatings
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5. An investigation of hysteresis effects as a function of pumping speed, sputtering current, and O2/Ar ratio, in Ti‐O2reactive sputtering processes
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1. Effect of N2 gas injection parameters on structure and properties of TiN thin films prepared by reactive gas pulse sputtering;Surface and Coatings Technology;2017-02
2. Continuous multi cycle nanoindentation studies on compositionally graded Ti1−xAlxN multilayer thin films;Materials Science and Engineering: A;2011-08
3. Nanofilms on a Rubber Support. Structure and Mechanism of Pseudoelasticity;International Polymer Science and Technology;2004-07
4. Time-dependent O2 mass balance change and target surface oxidation during mode transition in Ti–O2 reactive sputtering;Journal of Applied Physics;2000-02-15
5. Hardness of compositionally nano-modulated TiN films;Nanostructured Materials;1999-01
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