Passivation and VLSI packaging glasses with low flow points
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Dielectric Breakdown and Device Evaluation of Fritted Glass Compositions
2. Planarization of Phosphorus‐Doped Silicon Dioxide
3. A Scanning Electron Microscope Investigation of Glass Flow in MOS Integrated Circuit Fabrication
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