Funder
Czech Science Foundation (GA CR)
MOST
Subject
Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry,Environmental Chemistry,Biochemistry
Reference43 articles.
1. State-of-the-Technology Report. Technology Transfer #05104693A-ENG International SEMATECH Manufacturing Initiative;Reduction of Perfluorocompound (PFC) Emissions,2005
2. Abatement of PFCs from semiconductor manufacturing processes by nonthermal plasma technologies: a critical review;Chang;Ind. Eng. Chem. Res.,2006
3. Remote-plasma- enhanced reaction between a silicon surface and trifluoroacetylfluoride gas;Saito;J. Vac. Sci. Technol. A,2001
4. Effective PFC Gas Abatement in a Production Environment Semiconductor Fabtech-10th Ed;Seeley,2000
5. Etching Process Development of SiO2 Using Inductively Coupled Plasma. MSc. Thesis;Alam,2015
Cited by
29 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献