Non-contacting straightness measurement to nanometre accuracy
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference10 articles.
1. Determining gravitational deformation of an optical flat by liquid surface interferometry;Debenham;Precision Engineering,1980
2. Optical Components for x-ray Microscopy;Franks;Ann N.Y. Acad. Sci.,1980
3. Sub-nanometre surface texture and profile measurement with NANOSURF 2;Lindsey;Ann. C.I.R.P.,1988
4. Assessment of surface finish on bulk scattering materials: a comparison between optical laser stylus and mechanical stylus profilometers;Mattsson;Precision Engineering,1993
5. Delayed elastic effects in the glass Zerodur and ULE at room temperature;Pepi;Applied Optics,1991
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation on Modulation-Based Straightness Measurement;Sensors;2023-03-07
2. Square Layout Four-Point Method for Two-Dimensional Profile Measurement and Self-Calibration Method of Zero-Adjustment Error;International Journal of Automation Technology;2018-09-05
3. Development of a 6-DoF motion system for realizing a linear datum for geometric measurements;Review of Scientific Instruments;2016-08
4. Design of a Straightness Measurement Device for the Slider's Motion of the Press;Applied Mechanics and Materials;2012-10
5. A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement;Measurement Science and Technology;2007-11-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3