CVD grown silicon thin films with high carbon concentration: morphology and self-assembly controlled by surface segregation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference17 articles.
1. The solubility of carbon in pulled silicon crystals
2. Si1−yCy/Si(001) heterostructures made by sublimation of SiC during silicon molecular beam epitaxy
3. Physics of Amorphous Silicon–Carbon Alloys
4. Preparation of Microcrystalline Silicon Carbide Films by Hydrogen-Radical-Enhanced Chemical Vapor Deposition Using Tetramethylsilane
5. Micro-Raman study of reactive pulsed laser ablation deposited silicon carbon alloy films
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1. Formation of silicon nanodots from dysprosium-doped amorphous SiCxOy films grown by hot-filament assisted chemical vapor deposition of CH3SiH3 and Dy(DPM)3 gas jets;Applied Surface Science;2007-08
2. Epitaxy of carbon-rich silicon with MBE;Materials Science and Engineering: B;2002-02
3. Supersonic-Free-Jet CVD Growth of Dy-doped Silicon Films for 1.3 Micron LED;MRS Proceedings;2002
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