Oxygen concentration in Czochralski silicon crystals depending on silicon monoxide evaporation from boron doped silicon melts
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Oxygen precipitation effects on Sin+‐pjunction leakage behavior
2. Impact of silicon substrates on leakage currents
3. Deep Levels Associated with Oxygen Precipitation in CZ Silicon and Correlation with Minority Carrier Lifetimes
4. Oxygen Precipitation and MOS Leakage after a Process Heat Simulation
5. Impact of oxygen related extended defects on silicon diode characteristics
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