Depth of origin and angular spectrum of sputtered atoms
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference33 articles.
1. Sputtering by ion bombardment theoretical concepts
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
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5. Computer simulation of atomic mixing during ion bombardment
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