Initial performance results from the NV1002 high energy ion implanter-Reference-Cited by-同舟云学术

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Initial performance results from the NV1002 high energy ion implanter

Published:1991-04 Issue:1-4 Volume:55 Page:473-477
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

McIntyre E.,Balek D.,Boisseau P.,Dart A.,Denholm A.S.,Glavish H.,Hayden C.,Kaminski L.,Libby B.,Meyyappan N.,O'Brien J.,Sinclair F.,Whaley K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. H.F. Glavish, A. S. Denholm and G.K. Simcox, US Patent 4667111, 1987.

2. Production high energy ion implanters using radio frequency acceleration

3. Radio-frequency linear accelerators for ion implanters

4. Linear-accelerator-based high energy implanter with milliampere capability

5. Production high-energy ion implanters with milliampere beam capabilities

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Implanters;Ion Implantation: Basics to Device Fabrication;1995

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