Production high energy ion implanters using radio frequency acceleration-Reference-Cited by-同舟云学术

Production high energy ion implanters using radio frequency acceleration

Published:1987-01 Issue:1-4 Volume:21 Page:264-269
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Glavish H.F.,Bernhardt D.,Boisseau P.,Libby B.,Simcox G.,Denholm A.S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. High energy ion implantation

2. Semiconductor International;Current,1985

3. The Production of Heavy High Speed Ions without the Use of High Voltages

4. The quarter wave resonator as a superconducting linac element

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