Author:
Kaim R.E.,van der Meulen P.F.H.M.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. DC Parallel Ribbon Ion Beams for High-Dose Processes;Ion Beam Technology and Applications;2023-11-22
2. Ion Beam Technology;Ion Beams in Materials Processing and Analysis;2012
3. Concepts and designs of ion implantation equipment for semiconductor processing;Review of Scientific Instruments;2006-11
4. Overview of the Eaton NV-8200P high beam purity, parallel scanning implanter;Ion Implantation Technology–92;1993
5. High energy P implants in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-01