Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Review of secondary ion mass spectrometry characterization of contamination associated with ion implantation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-07
2. Control system for a 300 kV ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-05
3. Lattice imaging study of in-depth disordering of Si-implanted GaAs;Applied Physics A Solids and Surfaces;1988-07