Author:
Liebert Reuel,Pedersen Bjorn,Ehrlich Charles,Callahan William
Subject
Instrumentation,Nuclear and High Energy Physics
Reference4 articles.
1. Applications of Magnetic Scanning to High Current Implantation
2. these Proceedings (Ion Implantation Equip. & Tech. '84);Pedersen,1984
3. these Proceedings (Ion Implantation Equip. & Tech. '84);Ehrlich,1984
4. these Proceedings (Ion Implantation Equip. & Tech. '84);Delforge,1984
Cited by
12 articles.
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1. A high‐current microwave ion source for ion implantation;Review of Scientific Instruments;1992-04
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3. An analysis of vacuum effects on ion implanter performance;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Nonintrusive position measurement of magnetically scanned ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
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