Author:
Scaife William,Wagner Dennis,Faul William
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Self-Annealing in Ion-Implaned Silicon;Physica Status Solidi (a);1989-03-16
2. Ion sources and implantation systems;Materials Science and Engineering;1987-06
3. Design of accelerators for ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-04
4. The Veeco 4840 automated implant system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01
5. Computer automation of high current ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01