Author:
Doherty B.J.,McCarron D.J.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
22 articles.
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1. Ion beams and their applications in high-resolution probe formation;IEEE Transactions on Plasma Science;2005-12
2. Microwave plasma source for high current ion beam neutralization;Review of Scientific Instruments;2000-02
3. Charging of substrates irradiated by particle beams;Applied Physics Letters;1997-12
4. Charging studies using the CHARM2 wafer surface charging monitor;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
5. Reliability issues concerning thin gate SiO2 and SiO2/Si interface for ULSI applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04