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Sputtering of metal alloys at elevated temperatures

  • Published:1994-05 Issue:1-4 Volume:90 Page:477-481
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Begrambekov L.B.,Zakharov A.M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

1. Sputtering by Particle Bombardment II;Betz,1983

2. Sputtering of CuNi alloys at elevated temperature

3. Criteria for bombardment-induced structural changes in non-metallic solids

4. Proc. Nat. Conf. Ionno-Lutchevaja Modifikacija Metallow;Begrambekov,1989

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of ion bombardment on the topography and chemical composition of the surface of Pd-Ba powder composites;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-11

2. Formation of two-component two-phase metal films at elevated temperatures;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2008-06

3. Multiparameter investigation of the sputtering behavior of Ag∕Cu Alloys for low energy argon ion bombardment;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2008-05

4. Simulation of sputtering from epitaxial metal overlayers: Ni/Cu(100) and Cu/Ni(100);Surface Science;1999-10

5. Temperature dependence of the total sputtering yield of a two-phase () alloy for 200 eV Ar+ ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-01
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