Author:
Current M.I,Mathur R,Kump M,Larson L.A
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Dynamic MC simulation of low-energy ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-06
2. Ion beams in silicon processing and characterization;Journal of Applied Physics;1997-05-15
3. Energetic Ion Beams in Semiconductor Processing: Summary of a Doe Panel Study;MRS Proceedings;1995