Historical perspectives on ion implantation-Reference-Cited by-同舟云学术

Historical perspectives on ion implantation

Published:1987-01 Issue:1-4 Volume:21 Page:83-89
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Gibbons James F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Proc. Int. Conf. on Electromagnetic Isotope Separators,1965

2. Int. Conf. on Applications of Ion Beams to Semiconductor Technology,1967

3. I. Ion Implantation,1971

4. II. Int. Conf. on Ion Implantation in Semiconductors,1971

5. III. Ion Implantation in Semiconductors and Other Materials,1973

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