Author:
Grabowski K.S.,Kahn A.D.F.,Donovan E.P.,Carosella C.A.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Ion beam assisted deposition of substoichiometric silicon nitride
2. E.P. Donovan, D. Van Vechten, A.D.F. Kahn, C.A. Carosella and G.K. Hubler, to be published in Applied Optics.
3. D. Van Vechten, G.K. Hubler and E.P. Donovan, to be published in J. Vac. Sci. Technol. A.
4. Characterization of a 3 cm Kaufman ion source with nitrogen feed gas
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