Ion beam assisted deposition of insulating layers
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference30 articles.
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Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Investigation of optical and structural properties of ion-assisted deposition (IAD) ZrO2 thin films;International Journal of Precision Engineering and Manufacturing;2013-11
2. Frequency dependent conductivity of aluminium nitride films prepared by ion beam-assisted deposition;Thin Solid Films;2003-06
3. Structural phase transitions in ZrO2 films induced by ion bombardment—Argon irradiation versus implantation;Journal of Applied Physics;2003-05
4. Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-09
5. Electrical resistivity of titanium nitride thin films prepared by ion beam-assisted deposition;Physica B: Condensed Matter;2001-12
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