Author:
Harper James M.E.,Cuomo Jerome J.,Gambino Richard J.,Kaufman Harold R.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference42 articles.
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2. Thin Film Processes,1978
3. Proc. 25th Annual Tech. Conf., Soc. Vac. Coaters;Cuomo,1982
4. Influence of sputtering parameters on the composition of multicomponent films
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