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RBS spectra for thin films with surface roughness

  • Published:1992-12 Issue:3-4 Volume:72 Page:452-456
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Shorin V.S.,Sosnin A.N.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Backscattering Spectrometry;Chu,1978

2. Backscattering of Fast Ions;Shipatov,1988

3. Surface topology using rutherford backscattering

4. R.B.S. Microscopic "Tomography"

5. Proc. 2nd Sov. Conf. on Ion Beam Microanalysis;Sosnin,1991

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