Reactive accelerated cluster erosion (RACE) by ionized cluster beams-Reference-Cited by-同舟云学术

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Reactive accelerated cluster erosion (RACE) by ionized cluster beams

Published:1996-05 Issue:1-4 Volume:112 Page:86-88
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Gspann Jürgen

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Ionized-cluster beam deposition and epitaxy;Takagi,1988

2. Cluster deposition and cluster erosion with high-intensity ionized cluster beams

3. Microstructuring by nanoparticle impact lithography

4. Laser and Ion Beam Modification of Materials;Insepov,1994

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2. Recent Developments of Cluster Ion Beam —From Nano-fabrication to Analysis of Bio-materials—;Journal of the Vacuum Society of Japan;2016

3. Recent Progress in Cluster Beam Technique;Journal of the Japan Society for Precision Engineering;2016

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5. Energetic cluster ion beams: Modification of surfaces and shallow layers;Materials Science and Engineering: R: Reports;2011-08

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