Microstructuring by nanoparticle impact lithography-Reference-Cited by-同舟云学术

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Microstructuring by nanoparticle impact lithography

Published:1995-10 Issue:1 Volume:51 Page:37-39
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gspann Jürgen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. Micromachining by accelerated nanoparticle erosion;Gspann;Microelectron. Eng.,1995

2. Engineering considerations in hypervelocity impact;Gehring,1970

3. Cluster deposition and cluster erosion;Gspann,1992

4. Milling and drilling using CO2 clusters;Henkes;J. Phys.,1989

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1. Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment;Coatings;2023-05-17

2. Double-step gas cluster ion beam smoothing;Acta Physica Sinica;2021

3. Large-scale molecular dynamics simulations of cluster impact and erosion processes on a diamond surface;Physical Review B;2002-10-04

4. Atomic force microscopy of high velocity cluster impact induced nanostructures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-02

5. Reactive accelerated cluster erosion (RACE) by ionized cluster beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-05

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