Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Pioneering breakthroughs in implant monitor wafer cost reduction at 300 mm;SPIE Proceedings;1999-08-27
2. Reduction of measurement system variation using the discrimination ratio;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
3. Using a wedge oxide to monitor low energy beam purity by means of therma-wave measurements in the Eaton NV-8200P ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
4. Beam energy purity in the Eaton NV-8200P ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03