Author:
Cherekdjian S.,Weisenberger W.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
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Cited by
3 articles.
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1. Low dose monitors — the movements and causes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
2. Low dose monitors – the movements and causes;Ion Implantation Technology–92;1993
3. Ion beam system design for ULSI device requirements;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04