High-energy high-dose Ni irradiation of SOI structures-Reference-Cited by-同舟云学术

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High-energy high-dose Ni irradiation of SOI structures

Published:1993-01 Issue: Volume:80-81 Page:807-812
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Lindner J.K.N.,Kersten P.,te Kaat E.H.,Henke S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference12 articles.

1. Ion Beam Synthesis of Epitaxial Silicides: Fabrication, Characterization and Applications;Mantl,1992

2. Formation of CoSi2 in SIMOX wafers by high dose cobalt implantation

3. MRS volume 17 issue 6 Cover and Front matter

4. Synthesis of NiSi2 by 6 MeV Ni implantation into silicon

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural study and ion-beam channelling in Si 〈1 0 0〉 modified by Kr+, Ag+, 2+ and Au+, 2+ ions;Applied Surface Science;2018-11

2. Structural damage and ion-channelling effects in a single-crystal Si layer modified by medium-heavy ions;Surface and Interface Analysis;2018-07-13

3. MeV metal ion implantations for buried layer fabrication in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-02

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