A high current sheet plasma ion source-Reference-Cited by-同舟云学术

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A high current sheet plasma ion source

Published:1989-02 Issue: Volume:37-38 Page:169-172
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Takagi K.,Tsugueda T.,Fukui R.,Tsuboi H.,Katagawa T.,Yamakawa H.,Hoshino A.,Agawa Y.,Kikuchi R.,Takayama K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. Proc. 11th Symp. on ISIAT '87;Matsuda,1987

2. A 26‐cm electron‐cyclotron‐resonance ion source for reactive ion beam etching of SiO2 and Si

3. Microwave ion source for high‐current implanter

4. Proc. 10th Symp. on ISIAT '86;Satou,1986

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Production of sheet plasma using a TP-D plasma source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-04

2. Development of a high energy large sheet ion beam system and a low energy ion beam deposition system;Laser and Ion Beam Modification of Materials;1994

3. PRODUCTION OF RF SLAB PLASMA USING RECTANGULAR MAGNETIC LINE CUSP FIELD;Ion Implantation Technology–92;1993

4. A Compact Sheet Ion Source for Metal Ion Beam;Ion Implantation Technology–92;1993

5. Ion sources for ion beam assisted thin‐film depositiona);Review of Scientific Instruments;1992-11

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