Subject
Instrumentation,Nuclear and High Energy Physics
Reference26 articles.
1. High energy ion implantation
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12 articles.
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1. Semiconductor Ion Implanters;AIP Conference Proceedings;2011
2. Ion Implantation;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
3. Concepts and designs of ion implantation equipment for semiconductor processing;Review of Scientific Instruments;2006-11
4. Simplified modelling of an ion linac used for ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-03
5. Initial performance results from the NV1002 high energy ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04