Author:
Ohmura Y.,Iwaki M.,Shiokawa T.,Toyoda K.,Namba S.,Okabe Y.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
2 articles.
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1. Oxygen Gettering and Thermal Donor Formation at Post-Implantation Annealing of Silicon;Early Stages of Oxygen Precipitation in Silicon;1996
2. Platelet defects in hydrogen implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-01