Platelet defects in hydrogen implanted silicon
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference51 articles.
1. Effect of hydrogen on shallow dopants in crystalline silicon
2. Observation of boron acceptor neutralization in silicon produced by CF4reactive ion etching or Ar ion beam etching
3. Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen
4. Hydrogen Passivation of Shallow Acceptors in Silicon
5. A comparative study of D and H implantation-induced shallow donors in Si
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