Author:
Takai M.,Matsuo T.,Kinomura A.,Namba S.,Inoue K.,Ishibashi K.,Kawata Y.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
14 articles.
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2. Design of a new high voltage generator for ion beam analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09
3. Nuclear microprobe application to semiconductor process development: Silicide formation and multi-layered structure;Radiation Effects and Defects in Solids;1994-01
4. Data processing for RBS tomography analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05
5. Micro-RBS analysis using a toroidal electrostatic analyzer;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05