Author:
Takai M.,Katayama Y.,Lohner T.,Kinomura A.,Ryssel H.,Tsien P. H.,Burte E.,Satou M.,Chayahara A.
Subject
Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation
Cited by
1 articles.
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1. Applications of nuclear microprobes to semiconductor process developments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09