Ion beam injection system for a variable energy RFQ accelerator
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference7 articles.
1. High energy ion implantation
2. Surface metallurgy with high energy heavy ion beams
3. Materials modification by MeV ion implantation
4. Ion beam acceleration using variable frequency RFQ
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of a continuously variable energy radio frequency quadrupole accelerator for SiC power semiconductor device fabrication;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
2. High energy aluminum ion implantation using a variable energy radio frequency quadrupole implanter;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-03
3. Variable energy r.f. quadrupole for high-energy ion implantation;Surface and Coatings Technology;1994-08
4. Acceleration of high current heavy ions using a variable energy radio‐frequency quadrupole linac and measurement of the input beam emittance;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-03
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