Materials modification by MeV ion implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
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3. Acceleration of high current heavy ions using a variable energy radio‐frequency quadrupole linac and measurement of the input beam emittance;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-03
4. Ion beam injection system for a variable energy RFQ accelerator;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
5. A new generation of single-ended Van de Graaff accelerators for ion implantation and ion beam analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-04
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