Acceleration of high current heavy ions using a variable energy radio‐frequency quadrupole linac and measurement of the input beam emittance-Reference-Cited by-同舟云学术

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Acceleration of high current heavy ions using a variable energy radio‐frequency quadrupole linac and measurement of the input beam emittance

Published:1994-03 Issue:2 Volume:12 Page:399-404
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Amemiya Kensuke,Tokiguchi Katsumi,Hakamata Yoshimi,Yamada Satoru,Hirao Yasuo,Tokuda Noboru

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.579254

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004

2. High energy aluminum ion implantation using a variable energy radio frequency quadrupole implanter;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-03

3. Measurement of input beam emittance to obtain MeV, mA-class heavy ion beams in a VERFQ linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1995-09

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