Author:
Wang Zhong-Lie,Zhao Qing-Tai,Wang Ke-Ming,Shi Bo-Rong
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Effect of helium ion beam treatment on the etching rate of silicon nitride;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04
2. Charged point defects in semiconductors;Materials Science and Engineering: R: Reports;2006-12
3. Effects of MeV Si ion irradiation on the properties of shallow P+N junctions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-02
4. Introduction;Charged Semiconductor Defects