Mass-separated ion beam deposition of diamond-like thin films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference22 articles.
1. Chemical structure and physical properties of diamond-like amorphous carbon films prepared by magnetron sputtering
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. Comparison of diamondlike coatings deposited with C+and various hydrocarbon ion beams
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1. Graded layer design for stress-reduced and strongly adherent superhard amorphous carbon films;Surface and Coatings Technology;1999-09
2. Microstructural analysis of hard amorphous carbon films deposited with high-energy ion beams;Applied Surface Science;1999-08
3. Characterization of amorphous carbon rich Si1−xCx thin films obtained using high energy hydrocarbon ion beams on Si;Applied Surface Science;1999-03
4. Structure and thermal behavior of N containing a-C films obtained by high energy ion beam deposition;Applied Surface Science;1997-11
5. Characterization of hard amorphous carbon films deposited with high-energy ion beams;Applied Surface Science;1996-11
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