Collision dominated preferential sputtering of tantalum oxide-Reference-Cited by-同舟云学术

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Collision dominated preferential sputtering of tantalum oxide

Published:1992-12 Issue:12 Volume:43 Page:1207-1216
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Baretzky B,Möller W,Taglauer E

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference63 articles.

1. Sputtering by Particle Bombardment II;Betz,1983

2. Ion Implantation and Beam Processing;Andersen,1984

3. Chemistry and Physics of Solid Surfaces V;Kelly,1984

4. Abstract: Sputtering of multicomponent metal and semiconductor targets

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