Optical properties of TiNx produced by reactive evaporation and reactive ion-beam sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Effect of non-stoichiometry on the optical properties of thin films of TiNx
2. Optical properties of substoichiometric TiNx
3. Activated Reactive Evaporation Process for High Rate Deposition of Compounds
4. Coating Fabry-Perot interferometer plates with broadband multilayer dielectric mirrors
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