Computer simulation of film thickness distribution in symmetrical magnet magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference9 articles.
1. Step coverage simulation and measurement in a dc planar magnetron sputtering system
2. Spatial distribution of sputtered atoms from magnetron source
3. Film thickness distribution in magnetron sputtering
4. The sputter deposition process: a Monte-Carlo study
5. Computer simulation of growth of thin films fabricated by the sputtering method: comparison with experiment
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