The effect of the external parameters of sputtering on the internal parameters of the discharge plasma
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference20 articles.
1. Préparation et étude des propriétés de transport de films amorphes NixAg1−x
2. Plasma characterization in sputtering processes using the Langmuir probe technique
3. Electron energy distributions in a sputtering discharge
4. Analyse du plasma ge´ne´rateur de couches minces d'oxydes de cuivre par pulve´risation cathodique re´active
5. DC diode sputtering of titanium: determination of optimal deposition conditions by electrical and spectroscopic investigations
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Experimental study of a low-pressure glow discharge in air in large-diameter discharge tubes: I. conditions for the normal regime of a glow discharge;Plasma Physics Reports;2000-12
2. Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement;Vacuum;1999-11
3. A comparison of internal plasma parameters in a conventional planar magnetron and a magnetron with additional plasma confinement;Plasma Sources Science and Technology;1997-02-01
4. Magnetic properties of Ni0.5Ag0.5 thin films;Materials Chemistry and Physics;1988-06
5. Dépôt d'alliages amorphes NixAg1 - x par pulvérisation RF ; étude en temps réel de leurs cinétiques de cristallisation;Revue de Physique Appliquée;1986
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