A study of the altered layer produced by oxygen bombardment of silicon
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Proc. 6th Int Conf SIMS;Augustus,1987
2. E A Clark, M G Dowsett, P D Augustus, G D T Spiller, G R Thomas and I Sutherland, to be published.
3. Surface transient behavior of the 30Si+ yield with angle of incidence and energy of an O+2 primary beam
4. Background formation in SIMS analysis of hydrogen, carbon, nitrogen and oxygen in silicon
5. An AES-SIMS study of silicon oxidation induced by ion or electron bombardment
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. O2 + probe-sample conditions for ultra low energy SIMS depth profiling of nanometre scale Si0.4 Ge0.6 /Ge quantum wells;Surface and Interface Analysis;2012-04-20
2. Overcoming Low Ge Ionization and Erosion Rate Variation for Quantitative Ultralow Energy Secondary Ion Mass Spectrometry Depth Profiles of Si1–xGex/Ge Quantum Well Structures;Analytical Chemistry;2012-02-24
3. SIMS depth profiling and TEM imaging of the SIMS altered layer;Applied Surface Science;2008-12
4. Study of altered layer formation in O2+-bombarded SiGe alloys using a novel crossed bevel technique;Surface and Interface Analysis;1999-09
5. Effects of oxygen flooding on sputtering and ionization processes during ion bombardment;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1997-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3