RBS, RHEED and THEED studies of SIMOX and SIMNI structures formed by ion beam synthesis
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference30 articles.
1. New trends in SIMOX
2. Ion Beam Modification of Insulators;Wilson,1987
3. Fabrication of buried layers of SiO2 and Si3N4 a using ion beam synthesis
4. High quality silicon on insulator structures formed by the thermal redistribution of implanted nitrogen
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Role of electronic and nuclear energy losses in swift heavy ion beam induced epitaxial crystallization of a buried Si3N4 layer;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-04
2. MeV heavy ion beam induced epitaxial crystallization of buried Si3N4 layer;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-03
3. Swift heavy-ion-induced epitaxial crystallization of buried Si3N4 layer;Journal of Applied Physics;2005-07
4. A comparative study of primary ion energy dependence of secondary ion yields from Si and Ge surfaces under inert and reactive ion bombardment;Applied Surface Science;1995-02
5. Direct Formation of Thin Film Nitride Structures by High Intensity Ion Implantation of Nitrogen into Silicon;Physical and Technical Problems of SOI Structures and Devices;1995
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