Author:
Braun P,Farber W,Betz G,Viehböck FP
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
20 articles.
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1. Energy and angular distributions of sputtered particles;International Journal of Mass Spectrometry and Ion Processes;1994-12
2. Bombardment-induced compositional change in MgAl2O4, MgO and A12O3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-03
3. Sputtering of insulators;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-05
4. TiW nitride thermally stable Schottky contacts to GaAs: Characterization and application to self-aligned gate field-effect transistor fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1987-11
5. The Theory of the Preferential Sputtering of Alloys, Including the Role of Gibbsian Segregation;Erosion and Growth of Solids Stimulated by Atom and Ion Beams;1986