Energy and angular distributions of sputtered particles
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Published:1994-12
Issue:1
Volume:140
Page:1-110
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ISSN:0168-1176
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Container-title:International Journal of Mass Spectrometry and Ion Processes
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language:en
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Short-container-title:International Journal of Mass Spectrometry and Ion Processes
Author:
Betz Gerhard,Wien Karl
Cited by
203 articles.
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